发明名称 Touching microlens structure for a pixel sensor and method of fabrication
摘要 A structure and method for increasing the sensitivity of pixel sensors by eliminating a gap space formed between adjacent microlens structures in a pixel sensor array. Advantageously, exposure and flowing conditions are such that adjacent microlens structures touch (are webbed) at a horizontal cross-section, yet have a round lens shape in all directions. Particularly, exposure and flowing conditions are such that each touching microlens structure is formed to have a matched uniform radius of curvature at a horizontal cross-section and at a 45 degree cross-sections.
申请公布号 US7829965(B2) 申请公布日期 2010.11.09
申请号 US20050908601 申请日期 2005.05.18
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HOAGUE TIMOTHY J.;LEIDY ROBERT K.
分类号 H01L31/0232;G03F7/20 主分类号 H01L31/0232
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