发明名称 |
Method of supplying polishing liquid |
摘要 |
The present invention relates to a method of supplying the polishing liquid by periodically interrupt the supply of the polishing liquid, thus avoid over-supply or wastage of the polishing liquid. Hence, the consumption of the polishing liquid can be decreased and the production cost can be lower.
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申请公布号 |
US7828625(B2) |
申请公布日期 |
2010.11.09 |
申请号 |
US20070928155 |
申请日期 |
2007.10.30 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
YU CHI-MIN;CHUANG CHI-CHIH;SHIH HUI-SHEN |
分类号 |
B24B1/00 |
主分类号 |
B24B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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