发明名称 Copper gate electrode of liquid crystal display device and method of fabricating the same
摘要 A copper gate electrode, applied in a thin-film-transistor liquid crystal display (LCD) device, at least comprises a patterned copper layer formed on a glass substrate, and a barrier layer formed on the patterned copper layer. The barrier layer comprises at least one of nitrogen and phosphorus, or comprises an alloy formularized as M1M2R wherein M1 is cobalt (Co) or molybdenum (Mo), M2 is tungsten (W), molybdenum (Mo), rhenium (Re) or vanadium (V), and R is boron (B) or phosphorus (P).
申请公布号 US7829393(B2) 申请公布日期 2010.11.09
申请号 US20090366693 申请日期 2009.02.06
申请人 AU OPTRONICS CORP. 发明人 LIU YU-WEI;TSAI WEN-CHING;HUANG KUO-YU;LIN HUI-FEN
分类号 H01L21/00 主分类号 H01L21/00
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