发明名称 |
Method and system for controlling bake plate temperature in a semiconductor processing chamber |
摘要 |
A method of operating a bake plate disposed in a semiconductor processing chamber having a face plate opposing the bake plate includes providing a temperature control signal to the bake plate and measuring a face plate temperature associated with the face plate. The method also includes determining a difference between the face plate temperature and a predetermined temperature and modifying the temperature control signal provided to the bake plate in response to the determined difference.
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申请公布号 |
US7831135(B2) |
申请公布日期 |
2010.11.09 |
申请号 |
US20070849978 |
申请日期 |
2007.09.04 |
申请人 |
SOKUDO CO., LTD. |
发明人 |
HERCHEN HARALD |
分类号 |
A21B2/00;A21B1/00;C23C16/00 |
主分类号 |
A21B2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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