A MICRO GAS SENSOR AND A MANUFACTURIG METHOD THEROF

摘要

PURPOSE: A micro-gas sensor and a manufacturing method thereof, which directly forms various sensing materials on a narrow space for a patterning process, is provided to reduce manufacturing processes by omitting an organic removal process. CONSTITUTION: A micro-gas sensor comprises a semiconductor substrate(100), a micro heater layer, a sensing electrode layer and a sensing material layer. The micro heater layer is formed on the top part of the substrate. The sensing electrode layer is formed on the micro heater. The sensing material layer is formed on the top of the sensing electrode layer. A first insulation layer is formed between the semiconductor substrate and the micro heater layer.