发明名称 |
Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same |
摘要 |
A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.
|
申请公布号 |
US7830577(B2) |
申请公布日期 |
2010.11.09 |
申请号 |
US20080968743 |
申请日期 |
2008.01.03 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
GRASSHOFF THOMAS;KLOSE THOMAS;SANDNER THILO |
分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|