发明名称 |
Method and system for yield similarity of semiconductor devices |
摘要 |
Method and system for yield similarity of semiconductor devices. Embodiments of the present invention provides a method for yield similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices and a second plurality of semiconductor devices. The method also includes obtaining a first plurality of yields associated with a first yield related to the first plurality of semiconductor devices. The method further includes obtaining a second plurality of yields associated with a second yield related to the second plurality of semiconductor devices. The method also includes providing a processor and performing a first statistical analysis for the first plurality of yields using at least the processor. The method includes determining a first statistical distribution based on at least information associated with the first statistical analysis. The method includes performing a second statistical analysis for the second plurality of yields.
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申请公布号 |
US7831409(B2) |
申请公布日期 |
2010.11.09 |
申请号 |
US20070853794 |
申请日期 |
2007.09.11 |
申请人 |
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION |
发明人 |
WANG EUGENE |
分类号 |
G06F17/18 |
主分类号 |
G06F17/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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