Apparatus and method for removing static electricity when separating a slat display panel and holding chuck,申请号KR20080107466-传众专利搜索

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发明名称	Apparatus and method for removing static electricity when separating a slat display panel and holding chuck
摘要
申请公布号	KR100993075(B1)	申请公布日期	2010.11.08
申请号	KR20080107466	申请日期	2008.10.31
申请人		发明人
分类号	H01L21/687;G02F1/13	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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