发明名称 PICK AND PLACE APPARATUS
摘要 PURPOSE: A pick and place apparatus is provided to improve the rigidity of the cam plate by forming a plurality of cam grooves to prevent the pass through. CONSTITUTION: A plurality of pickers(10) is respectively arranged in longitudinal direction and traverse direction. A plurality of first cam plates(40) is respectively installed on both ends of a plurality of first deformable members. A cam plate drive device(60) is connected to the plurality of first cam plates.
申请公布号 KR20100118376(A) 申请公布日期 2010.11.05
申请号 KR20090037179 申请日期 2009.04.28
申请人 EVERTECHNO CO., LTD. 发明人 YEOM, JUNG TACK;LEE, SANG SU;RYU, SANG JIN
分类号 G01R31/26;H01L21/66;H01L21/67 主分类号 G01R31/26
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