| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt stage which performs smooth adjustment of a tilting angle and stable hold of a tilting angle, and to provide a microscope having the tilt stage. SOLUTION: The tilt stage 3 includes: a base portion 21; a stage portion 23 attached to the base potion 21 and tiltable while sliding relative to the base portion 21; and an air pressure adjusting means for adjusting air pressure in a sealed space 47 defined by the base portion 21 and stage portion 23, in order to adjust and hold the tilting angle of the stage portion 23 relative to the base portion 21. COPYRIGHT: (C)2011,JPO&INPIT
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