| 摘要 |
PROBLEM TO BE SOLVED: To provide a catalyst CVD system for efficiently dissipating heat in a connecting part of a catalyst body heated by performing electric supply with an electrode member. SOLUTION: A top end of a filament 15 is connected to a bottom end of an electrode 5 via a retaining member 12. The filament 15 is coupled to a slotted part 16 of the electrode 5, a diameter of the slotted part 16 is reduced by thread-engaging a nut member 14 on the electrode 5, the filament 15 is connected with surface contact to the electrode 5, and a contact part is controlled from becoming too high temperature by reducing electric contact resistance. COPYRIGHT: (C)2011,JPO&INPIT |
