LASER ILLUMINATION DEVICE, ILLUMINATION METHOD, SEMICONDUCTOR ELEMENT FABRICATION METHOD, PROJECTION-TYPE DISPLAY DEVICE, AND IMAGE DISPLAY METHOD USING PROJECTION-TYPE DISPLAY DEVICE

摘要

Provided is a laser illumination device that provides a light intensity distribution of an illumination light flux having a high brightness and a uniformity. The laser illumination device comprises: a plurality of light source modules (20) having a plurality of light source units (8) and a first optical system (12), the light source units (8) including a semiconductor laser (1), a laser medium (5) formed in a flat plate shape and having a waveguide structure, and a non-linear material (7), all of which are disposed on an identical plane, and continuously oscillating in a waveguide mode of the laser medium (5), the first optical system (12) coupling the laser oscillation light from the light source units (8); a second optical system (15) for coupling the laser light transmitted from the light source modules (20) through a first optical fiber (13) and a second optical fiber array (14); a uniformizing component (16) for converting the laser light from the second optical system (15) to uniformized laser light; and a third optical system (17) for projecting, with a predetermined magnification, the laser light uniformized through the uniformizing component (16) onto a substrate (19) as a surface (18) to be illuminated and obtaining an illumination light flux (11).