发明名称 |
Vorrichtung zum Belichten eines Substrats, Photomaske und modifiziertes Beleuchtungssystem der Vorrichtung und Verfahren zum Bilden eines Musters an einem Substrat unter Verwendung der Vorrichtung |
摘要 |
The mask has polarization patterns (210) arranged on a transparent substrate (200), which includes lines extending parallel to each other and the lines are opaque to light. The lattice patterns occupying spaces between the lines, have a series of stripes opaque to light and extending perpendicular to the lines of line/space pattern. The stripes have a pitch smaller than wavelength of light. Independent claims are also included for the following: (1) composite polarization modified illuminating system; (2) exposure apparatus; and (3) method of forming line/space circuit pattern. |
申请公布号 |
DE102005048380(B4) |
申请公布日期 |
2010.11.04 |
申请号 |
DE20051048380 |
申请日期 |
2005.10.10 |
申请人 |
SAMSUNG ELECTRONICS CO. LTD. |
发明人 |
KIM, HO-CHUL |
分类号 |
G03F7/20;G02B5/30;G03F1/36;G03F1/68;G03F1/70;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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