MOVABLE STAGE, AND CONVEYING DEVICE AND CHARGED PARTICLE BEAM DEVICE BOTH HAVING SAME

摘要

A movable stage has a first stage (12) movable in a first direction, a second stage (13) having at least a portion thereof located on the first stage (12) and movable in a second direction crossing the first direction, a generating section (MY) for generating drive power for moving the second stage (13) in the second direction, and power transmitting section (17, 20) for transmitting the drive power from the generating section (MY) to the second stage (13) and having at least a portion thereof adapted to operate as the first stage (12) moves.