| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell that can improves efficiency by effectively absorbing external light by forming regular embossed and depressed patterns of constant size on a surface of a transparent electrode. <P>SOLUTION: The method of manufacturing a solar cell includes steps of: forming a transparent conductive layer on a substrate by depositing a transparent conductive oxide under room temperature; crystallizing the transparent conductive layer by irradiating the transparent conductive layer with laser beam using a first laser; selectively etching the crystallized transparent conductive layer to form many embossed and depressed patterns at a surface of the transparent conductive layer; forming transparent electrodes in unit cells by patterning the transparent conductive layer having many embossed and depressed patterns; forming a pn junction semiconductor layer on the transparent electrodes and patterning the pn junction semiconductor layer; and forming rear electrodes on the patterned pn junction semiconductor layer by forming a metallic material layer and patterning the metallic material layer, the rear electrodes corresponding to the unit cells. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
