| 摘要 |
PURPOSE: A radiation-sensitive resin composition is provided to prevent coating unevenness and to save the solution. CONSTITUTION: A radiation-sensitive resin composition contains alkali-developable resin, polymeric unsaturated compound, radiation-sensitive polymerization initiator and solvent of chemical formula 1. In chemical formula 1, The content of the solvent is 5-90 mass% based on total solvent amount. The composition contains one or more selected from diethylene glycol dialkylethers, propylene glycol, alkyl ether acetates, ketones and esters. |
