| 发明名称 |
Microengineered Vacuum Interface for an Ionization System |
| 摘要 |
A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.
|
| 申请公布号 |
US2010276590(A1) |
申请公布日期 |
2010.11.04 |
| 申请号 |
US20100837100 |
申请日期 |
2010.07.15 |
| 申请人 |
MICROSAIC SYSTEMS LIMITED |
发明人 |
SYMS RICHARD;MOSELEY RICHARD WILLIAM |
| 分类号 |
H01J49/04;B23B35/00;B23K26/38;C23F1/02;H01L21/465 |
主分类号 |
H01J49/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
