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发明名称
Sputtern von AG-Basislegierungszielmaterial und Verfahren zur Herstellung davon
摘要
申请公布号
DE602008002662(D1)
申请公布日期
2010.11.04
申请号
DE200860002662T
申请日期
2008.07.04
申请人
KOBELCO RESEARCH INSTITUTE INC.
发明人
TAKAGI, KATSUTOSHI;MORIMOTO, HIDEKAZU;MATSUZAKI, HITOSHI;TAUCHI, YUKI
分类号
C23C14/34;C22C5/06;C23C14/14;G11B7/258
主分类号
C23C14/34
代理机构
代理人
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