METHOD OF MANUFACTURING THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To manufacture a TFT (Thin Film Transistor) without using a mask pattern that uses a resist composition and to manufacture a display device using the TFT. SOLUTION: The method of manufacturing the display device employs a roll-to-toll system, and the method comprises: a step in which an insulating resin film with an opening is formed on a flexible substrate by a first liquid drop discharging means in which a plurality of discharge outlets for a composition are arranged in a uniaxial direction; a step in which a gage electrode is formed in the opening by a second liquid drop discharging means in which a plurality of discharge outlets for the composition are arranged in the uniaxial direction; and a step in which a gate insulating film is formed on the gate electrode and on the insulating resin film by a film forming means having a nozzle body in which a plurality of discharging ports for plasma are arranged in the uniaxial direction. COPYRIGHT: (C)2011,JPO&INPIT