发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device having a housing means for housing a workpiece, which facilitates carrying in and out the workpiece for the housing means. SOLUTION: In the processing device in which a transfer means transfers the workpiece W1 from a housing means 31 and transfers it to a holding means and the workpiece W1 held in the holding means is processed, the housing means 31 includes a workpiece placing table 33 for placing the workpiece W1, the workpiece placing table 33 includes an entrance/exit portion 332 used as an entrance/exit of the workpiece W1 when the workpiece W1 is carried in or out to or from the housing means 31, and a rotating mechanism 333 for rotating the workpiece placing table 33 so that the entrance/exit portion 332 faces upward using the direction crossing at right angles to the carrying-in/out direction of the workpiece W1 in a horizontal plane as a rotating axis 333a. With this configuration, an operator sees the entry/exit portion 332 so that the workpiece W1 is housed in a desired position and the desired workpiece W1 is easily taken out. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010251356(A) 申请公布日期 2010.11.04
申请号 JP20090095856 申请日期 2009.04.10
申请人 DISCO ABRASIVE SYST LTD 发明人 NOMURA YUKI;ISHII SHIGERU
分类号 H01L21/301;H01L21/677 主分类号 H01L21/301
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