发明名称 FILM FORMING COMPOSITION FOR OPTICAL IMPRINT
摘要 <P>PROBLEM TO BE SOLVED: To provide a film forming composition for optical imprint that generates no crack after releasing a mold and makes a pattern mark of the mold, and can form a film having high elasticity. <P>SOLUTION: The film forming composition for optical imprint contains: (A) component, a hydrolysis condensate of at least one kind of specified hydrolysis silane, or a mixture of a hydrolysate of the hydrolysis silane and the hydrolysis condensate; (B) component, a compound having at least two polymerization groups; and (C) component, a photopolymerization initiator. Furthermore, it contains other components if needed. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010251434(A) 申请公布日期 2010.11.04
申请号 JP20090097545 申请日期 2009.04.14
申请人 NISSAN CHEM IND LTD 发明人 KATO HIROSHI;KOBAYASHI JUNPEI;NEGI TAKAYUKI;SUZUKI MASAMUTSU
分类号 H01L21/027;C08F2/44;C08F2/48;C08G77/04;C09D4/00;C09D7/12;C09D183/02;C09D183/04;G02F1/1335;H01L21/312;H01L31/04 主分类号 H01L21/027
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