发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device including an LDMOS transistor and a scaled MOS transistor actualized through a minimum number of process steps as compared with conventional manufacturing methods, and to provide a method of manufacturing the same. SOLUTION: After a sidewall 27 is formed, only a sidewall of a gate electrode sidewall in an LDMOS source region opened corresponding a resist pattern 28 is removed, and high-density diffusion layers of source and drain regions of the LDMOS and the scaled MOS are formed at the same time to simplify the steps, thereby reducing the cost. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010251624(A) 申请公布日期 2010.11.04
申请号 JP20090101542 申请日期 2009.04.20
申请人 HITACHI LTD 发明人 NOGUCHI JUNJI;KITAZAWA KEIGO
分类号 H01L21/8234;H01L27/088 主分类号 H01L21/8234
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