| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment device in which plasma treatment can be applied efficiently while preventing the generation of abnormal discharge to a work. <P>SOLUTION: The plasma treatment device 1 has an electrode unit 2 installed above the work 10, an energizing means 3, a treatment gas supply means 4, and a cooling means 5. The electrode unit 2 has an earth electrode 21 equipped with the electrode body 211 constituted of a longitudinal columnar body and a through-hole 212 installed along a longitudinal direction in the electrode body 211, and an applying electrode 22 equipped with an electrode rod 221 inserted through the through-hole 212. A gap is formed between the through-hole 212 and the electrode rod 221, and the gap functions as a plasma forming space 27. Moreover, a slit 28 to open the plasma forming space 27 to the outside is formed in the earth electrode 21. By ejecting plasma P from the slit 28, the plasma treatment is applied to the work 10. <P>COPYRIGHT: (C)2011,JPO&INPIT |
