| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding device and a method of holding a substrate, both of which control the movement of a floated glass substrate so as to securely hold in a predetermined position. SOLUTION: The substrate holding device, which floats the substrate W from a floating stage 3 and also positions the substrate W to hold, is provided with: a holding member 11 places the substrate W which is provided in a protruding condition from the floating stage 3 and is delivered; a control unit which lowers the holding member 11 in which the substrate W is placed and stops the holding member 11 at a position higher than a height at which the substrate W is floated by air discharged from the floating stage; and a positioning mechanism in which, in the state where the holding member 11 is brought into contact with the back side of the floated substrate W and the substrate W is held, the substrate W is made to relatively move with respect to the holding member 11 so as to position the substrate W in the predetermined position. COPYRIGHT: (C)2011,JPO&INPIT |
