| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element with a protection film having a high voltage resistance, thereby preventing insulation destruction of a piezoelectric material. SOLUTION: This piezoelectric element includes the piezoelectric material (14), two electrodes (13, 15) sandwiching the piezoelectric material (14), protection layers (16, 19) covering the piezoelectric material (14) and two electrodes (13, 15), and an antistatic layer (17) formed on at least one of a surface of the protection layer (16) and inner portions of the protection layers (16, 19). COPYRIGHT: (C)2011,JPO&INPIT
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