LAMINATED STRUCTURE, DONOR SUBSTRATE AND MANUFACTURING METHOD OF LAMINATED STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a laminated structure provided with laminated bodies of metallic films having≥5μm film thickness with certain intervals on a substrate, wherein the adhesive strength among the metallic films is made higher than a case that the difference of the thickness of the metallic films of the same class between that of the laminated body belonging to a group having the minimum surface area and that of a laminated body belonging to a group having the maximum surface area when the plurality of the laminated body is divided into a plurality of kinds of the groups each having a different surface area in the plane direction is over 2μm. SOLUTION: The laminated structure 10 is constructed by providing a plurality of the laminated bodies 12 having one or a plurality of the metallic films 14 having≥5μm thickness laminated with the certain interval on the substrate 16. The plurality of laminated body 12 constituting the laminated structure 10 is divided into a plurality of kinds of the groups each having different surface area in the plane direction of the substrate 16 and the difference of the metallic films 14 in the same class between that of the laminated body 12 belonging to a first group having the maximum surface area and that of the laminated body 12 belonging to a second group having the minimum surface area is≤2μm. COPYRIGHT: (C)2011,JPO&INPIT