METHOD FOR MANUFACTURING A CDS/CDTE THIN FILM SOLAR CELL

摘要

The present invention relates to a method for manufacturing a CdS/CdTe thin film solar cell in an in-line, interback, or cluster system, comprising the steps of: providing a substrate; depositing a transparent conductive oxide thin film on the substrate in a first sputtering chamber; depositing a CdS thin film on the transparent conductive oxide thin film in a second sputtering chamber; depositing a CdTe thin film on the CdS thin film in a third sputtering chamber; and treating the CdTe thin film with CdCl2 in a heat treatment chamber. The third sputtering chamber is provided with a plurality of CdTe targets having lengths longer than the vertical length of the substrate and arranged beneath the substrate. The deposition of the CdTe thin film is performed through sputtering for supplying overlapped RF/DC power to the plurality of CdTe targets. Thus, the method of the present invention improves the productivity of large area CdS/CdTe thin film solar cells, and can be used to obtain a dense thin film at a low processing temperature.