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发明名称
Catadioptric projection objective
摘要
申请公布号
KR100991584(B1)
申请公布日期
2010.11.04
申请号
KR20067023338
申请日期
2005.04.07
申请人
发明人
分类号
G02B17/08;G02B17/06;G03F7/20
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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