| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate with a functional film capable of enhancing impact resistance with a simple method while having a desired optical function. <P>SOLUTION: In the method for manufacturing the substrate with the functional film by which an optical thin film is formed by vapor deposition of a metal oxide on a substrate made of a transparent resin under a nearly vacuum atmosphere using a physical vapor deposition method, when the metal oxide is deposited on the substrate, excess at least one of a gas selected from any of oxygen, nitrogen and a rare gas is introduced in the range of 1.0×10<SP>-2</SP>to 9.0×10<SP>-1</SP>Pa to perform vapor deposition. <P>COPYRIGHT: (C)2011,JPO&INPIT |
