发明名称 INTEGRATED FLOW CELL WITH SEMICONDUCTOR OXIDE TUBING
摘要 An integrated flow cell, the flow cell comprising a semiconductor substrate, and a fluidic conduit having an at least partially transparent semiconductor oxide tubing, wherein the semiconductor oxide tubing is formed with the semiconductor substrate.
申请公布号 US2010277722(A1) 申请公布日期 2010.11.04
申请号 US20080237398 申请日期 2008.09.25
申请人 AGILENT TECHNOLOGIES, INC. 发明人 KRAICZEK KARSTEN;MUELLER BENO;BEERLING TIMOTHY
分类号 G01N21/01;G01N21/05;G01N27/26;G01N30/74;H01L21/02 主分类号 G01N21/01
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