发明名称 |
INTEGRATED FLOW CELL WITH SEMICONDUCTOR OXIDE TUBING |
摘要 |
An integrated flow cell, the flow cell comprising a semiconductor substrate, and a fluidic conduit having an at least partially transparent semiconductor oxide tubing, wherein the semiconductor oxide tubing is formed with the semiconductor substrate.
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申请公布号 |
US2010277722(A1) |
申请公布日期 |
2010.11.04 |
申请号 |
US20080237398 |
申请日期 |
2008.09.25 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
KRAICZEK KARSTEN;MUELLER BENO;BEERLING TIMOTHY |
分类号 |
G01N21/01;G01N21/05;G01N27/26;G01N30/74;H01L21/02 |
主分类号 |
G01N21/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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