CAPACITANCE DIAPHRAGM GAUGE, VACUUM DEVICE, AND METHOD FOR MANUFACTURE OF DEVICE

摘要

Disclosed is a capacitance diaphragm gauge which comprises: a vacuum sealing chamber of which a part is a membrane electrode; two or more electrodes fixed in the vacuum sealing chamber and arranged so as to face the membrane electrode in the vacuum sealing chamber; and a signal output unit for outputting a signal for measuring a pressure based on the capacitance between the membrane electrode and each of the two or more electrodes.