| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device capable of easily performing washing the inside of a box body surrounding a polishing tool or the like. <P>SOLUTION: The polishing device has a polishing means 5 for polishing-machining a work W retained to a retaining means 7 for rotatably retaining the work W making a vertical direction as a rotation axis at a dry system. The polishing means 5 has a rotation support part 52 including the polishing tool 5b contacted with a surface Wb to be polished of the work W to polish the surface Wb to be polished, a spindle 5a for rotatably supporting the polishing tool 5b from an upper side making a vertical direction as a rotation axis and a cover part 5c surrounding the spindle 5a; the box body 51 surrounding at least the retaining means 7 and the polishing tool 5b; an openable/closable lid part 53 provided on a part of the box body 51; a box body inside washing means 54 arranged on an inner wall of the box body and jetting water in the box body 51; and a control means 56 for controlling the box body inside washing means 54 such that water is jet from the box body inside washing means 54 before opening the lid part 53 in order to exchange the polishing tool 5b exhausted by the polishing machining. <P>COPYRIGHT: (C)2011,JPO&INPIT |
