| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which can measure an optical axis of laser beams even during machining and can achieve stable machining by the laser beams. <P>SOLUTION: The laser beam machining apparatus 10 applies laser beams to machine a workpiece and includes a laser oscillator 11 that oscillates laser beams, mirror members 21, 22, 23, 24 that reflect the laser beams to change the traveling direction of the laser beams, lens members 15, 17 that regulate the beam diameter of the laser beams, a laser beam control unit 30 that changes the traveling direction of the laser beams, a temperature measuring unit 40 that comprises a plurality of temperature sensors arranged around a laser path through which the laser beams pass, and an optical axis position detection means 51 that detects the optical axis position of the laser beams in the laser path from measured values of the plurality of temperature sensors provided in the temperature measuring unit 40. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
