| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain an optical waveguide having low coupling loss with an optical fiber. <P>SOLUTION: A method for manufacturing the optical waveguide includes: a first etching step in which a mask of a first oxide film is formed in an area which is to become an optical waveguide on a substrate on which an oxide layer and an Si layer are laminated, and the Si layer is etched by using the first oxide film as the mask; a second oxide film-forming step in which after the first etching step, a second oxide film covering the Si layer is formed; a resist pattern-forming step in which two resist patterns are formed in areas which are to become both sides of the mask of the first oxide film on the second oxide film so that the distance of the resist patterns is mutually and gradually increased as approaching an output end of the optical waveguide; a second etching step in which the second oxide film is etched by using the resist patterns as the mask; a thermal oxidation step in which thermal oxidation is performed after the second etching process; and a third oxide film-forming step in which a third oxide film is formed after the thermal oxidation process. The Si layer is used as an optical waveguide. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
