| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of shortening time required for measurement and correction of chromatic aberration without lowering accuracy by taking into consideration the effects of magnification chromatic aberrations. SOLUTION: The charged particle beam device equipped with an aberration corrector for rectifying chromatic aberration is provided with a control part which corrects the respective aberrations, until the magnification chromatic aberration amount and the chromatic aberration amount become a prescribed threshold or less, and establishes or renews the threshold of the magnification chromatic aberration amount, based on the measured chromatic aberration amount. COPYRIGHT: (C)2011,JPO&INPIT
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