| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal device which can control a pre-tilt angle of a crystal molecule at a desired value to form an oriented film having high moisture-proof property at a favorable rate using a manufacturing apparatus which can be downsized. SOLUTION: The method includes processes of: using a spatter apparatus 3 having a pair of targets 5a and 5b facing each other with a plasma generation region interposed therebetween, obliquely emitting an inorganic material 5p for an oriented film from the targets 5a and 5b onto a substrate W to be processed to form on the substrate W, an inorganic oriented layer including a plurality of columnar structures grown in a direction tilted to the normal line Z of the substrate W; and performing a surface treatment on the inorganic oriented layer with a silane coupling agent including an alkyl group as a functional group to form an organic oriented layer composed of an organic monomolecular film chemically bonded to the inorganic oriented layer. In the surface treatment process, the pre-tilt angle of the crystal molecule is controlled at a desired value by selecting the silane coupling agent according to the number of carbon atoms. COPYRIGHT: (C)2011,JPO&INPIT
|
