发明名称 |
Vacuum coating unit for homogeneous PVD coating |
摘要 |
The apparatus includes a coating chamber, two or more cathodes which are arranged peripherally within the coating chamber, substrate carriers for holding the substrate, vacuum pumps and voltage sources wherein an individual anode is arranged centrally between the cathodes in the coating chamber and the substrate is positioned between the anode and the cathode. In each case a gas discharge with a plasma is ignited between the individual anode and the cathodes. The substrates are held fixed in position or are rotated about one or more axes and in the process subjected to the plasma.
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申请公布号 |
US2010276283(A1) |
申请公布日期 |
2010.11.04 |
申请号 |
US20070517515 |
申请日期 |
2007.12.03 |
申请人 |
MUENZ WOLF-DIETER;KUNKEL STEFAN |
发明人 |
MUENZ WOLF-DIETER;KUNKEL STEFAN |
分类号 |
H01J37/32;C23C14/35;H01J37/34 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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