| 发明名称 |
ELECTRIC NANODEVICE AND METHOD OF MANUFACTURING SAME |
| 摘要 |
A nanodevice is disclosed. The nanodevice comprises: a drain region, a source region opposite to the drain region and being separated therefrom at least with a trench, and a gate region, isolated from the drain and the source regions and from the trench. The trench has a height which is between 1 nm and 30 nm.
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| 申请公布号 |
US2010276669(A1) |
申请公布日期 |
2010.11.04 |
| 申请号 |
US20090811710 |
申请日期 |
2009.01.07 |
| 申请人 |
RICHTER SHACHAR;MENTOVICH ELAD;KALIFA ITSHAK |
发明人 |
RICHTER SHACHAR;MENTOVICH ELAD;KALIFA ITSHAK |
| 分类号 |
H01L29/772;H01L21/335;H01L21/84 |
主分类号 |
H01L29/772 |
| 代理机构 |
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