| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron gun capable of obtaining electron beams with high luminance and high stability used for an electron-beam equipment and a vacuum tube, especially, an electron microscope. <P>SOLUTION: The cold-cathode field emission electron gun used for an electronic optical equipment operates at 1,000°C or less, and as electron emission characteristics obtained, an emission current stability is less than 5%, and an angle current density is larger than 50μA/sr. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
