发明名称 Hafnium or zirconium oxide Coating
摘要 The invention concerns an optical coating (3, 3′), having a high refractive index and good optical properties (i.e., low absorption and scatter) and limited internal stresses in a spectral range extending from the visible to the near UV range (i.e., up to a wavelength of 220 nm). The coating (3, 3′) according to the invention consists of a hafnium- or zirconium-containing oxide HfxSiyOz or ZrxSiyOz, containing an silicon fraction (y) between 1 at. % and 10 at. %, especially between 1.5 at. % and 3 at. %.
申请公布号 US2010279124(A1) 申请公布日期 2010.11.04
申请号 US20090620585 申请日期 2009.11.17
申请人 LEYBOLD OPTICS GMBH 发明人 SCHERER MICHAEL
分类号 B32B17/06;B32B9/04;C09D1/00;C23C14/34 主分类号 B32B17/06
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