发明名称 |
LASER SYSTEMS AND METHODS USING TRIANGULAR-SHAPED TAILORED LASER PULSES FOR SELECTED TARGET CLASSES |
摘要 |
Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. At least one of the predefined temporal pulse profiles may be triangular. The target class may include, for example unpassivated electrically conductive links or other bare metal structures. Based on the target class associated with the selected target, a laser pulse is generated having a triangular temporal pulse profile. The generated laser pulse is used to process the selected structure.
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申请公布号 |
US2010276405(A1) |
申请公布日期 |
2010.11.04 |
申请号 |
US20100753659 |
申请日期 |
2010.04.02 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
CHO BONG H.;PUGH BRIAN L.;HOOPER ANDREW |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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地址 |
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