| 摘要 |
PURPOSE: A sapphire substrate with a periodic structure is provided to obtain the periodic structure on a surface by being etched using a cladding layer as an etching template. CONSTITUTION: A sapphire substrate(21) and a plurality of nano-size balls are prepared. A cladding layer is deposited in gaps between a part of the surface of the sapphire substrate and the balls through a chemical vapor deposition. A plurality of micro cavities(202) is formed on the surface of the sapphire substrate by eliminating the balls and the cladding layer. The micro cavities are arranged in an array. Planes(201) are formed between two adjacent micro cavities.
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