| 摘要 |
<p>PURPOSE: A digital micromirror device(DMD) micro-regulating apparatus is provided to minimize the volume of an exposure engine, containing a lens, by transferring a DMD in the X-direction and the Y-direction and rotating the DMD based on a center point. CONSTITUTION: A mirror reflects uniform light obtained through a diffraction optical element and a Fourier transferring lens from a light source. A DMD(103) on-off modulates the uniform light using a plurality of micromirrors. A first projection optical system and a second projection optical system transfer modulated light to a substrate on a stage. A DMD micro-regulating apparatus(100) sets an optical path.</p> |
