DETERMINING FLEET MATCHING PROBLEM AND ROOT CAUSE ISSUE FOR MEASUREMENT SYSTEM
摘要
<p>Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause issue of a matching problem, and for determining a fleet measurement precision metric. Method, system and program product are also disclosed for attempting to determine a root cause of a subject problem related to at least one of a measurement system under test (MSUT) and a fleet of at least one other measurement system.</p>
申请公布号
EP1851658(A4)
申请公布日期
2010.11.03
申请号
EP20060735756
申请日期
2006.02.22
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ARCHIE, CHARLES, N.;BANKE, GEORGE, W., JR.;SOLECKY, ERIC, P.