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发明名称
SUSCEPTOR WITH SUPPORT BOSSES
摘要
申请公布号
EP2245211(A2)
申请公布日期
2010.11.03
申请号
EP20080868647
申请日期
2008.12.22
申请人
MEMC ELECTRONIC MATERIALS, INC.
发明人
PITNEY, JOHN, A.;HAMANO, MANABU;HELLWIG, LANCE, G.
分类号
C23C16/54
主分类号
C23C16/54
代理机构
代理人
主权项
地址
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