| 发明名称 |
DEVICE AND METHOD FOR TREATING A SUBSTRATE IN THE FIELD OF SEMICONDUCTOR TECHNOLOGY, IN ADDITION TO A SYSTEM COMPRISING A DEVICE FOR TREATING A SUBSTRATE |
| 摘要 |
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| 申请公布号 |
EP1741130(B1) |
申请公布日期 |
2010.11.03 |
| 申请号 |
EP20050735966 |
申请日期 |
2005.04.19 |
| 申请人 |
SSE SISTER SEMICONDUCTOR EQUIPMENT GMBH |
发明人 |
HOFFMANN, DIRK |
| 分类号 |
H01L21/68;G03F7/16;H01L21/00;H01L21/677;H01L21/687 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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