| 摘要 |
<p>PURPOSE: An imprint apparatus is provided to pattern functional patterns on the chemical layer of a substrate by pressing and separating a stamp and a substrate which is loaded on a stage. CONSTITUTION: A stage(4) is in parallel with a stamp(2), and a substrate is loaded on the stage. A transferring unit(6) transfers the stage toward the stamp. A tilting part(8) includes a plurality of tiling units which is in connection with the stage. A sensor(10) detects the flatness of the stamp and the stage. A tilt-driving part compensates the flatness of the stamp and the stage based on a detection signal from the sensor.</p> |
