发明名称 Laser machining method
摘要 A laser machining method includes directing pulse laser light onto a surface of a brittle material substrate, and a laser light scanning step for scanning laser light along a scribe-scheduled line. The laser intensity of the pulse laser light is 1.0 × 10 8 W/cm 2 or greater and 1.0 × 10 10 W/cm 2 or less. The value obtained by multiplying the amount of heat input (J/cm 2 ) by the linear expansion coefficient (10 -7 /K) of the brittle material is in a range of 3000 or greater and 100000 or less. Furthermore, the number of pulses within a square circumscribing the condensed light diameter of the pulse laser light is two or greater.
申请公布号 EP2246146(A1) 申请公布日期 2010.11.03
申请号 EP20100161268 申请日期 2010.04.28
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. 发明人 FUKUHARA, KENJI;SHIMIZU, SEIJI;YAMAMOTO, KOUJI
分类号 B23K26/40;B23K26/06 主分类号 B23K26/40
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