发明名称 |
Corrosion-resistant multilayer ceramic member |
摘要 |
<p>The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.</p> |
申请公布号 |
EP2071610(B1) |
申请公布日期 |
2010.11.03 |
申请号 |
EP20080017214 |
申请日期 |
2008.09.30 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
KANO, SHOJI;YAMAMURA, WAICHI;KUBOTA, YOSHIHIRO |
分类号 |
H01L21/00;H01L21/683;H01L21/687;H02N13/00;H05B3/14 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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