发明名称 Corrosion-resistant multilayer ceramic member
摘要 <p>The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.</p>
申请公布号 EP2071610(B1) 申请公布日期 2010.11.03
申请号 EP20080017214 申请日期 2008.09.30
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 KANO, SHOJI;YAMAMURA, WAICHI;KUBOTA, YOSHIHIRO
分类号 H01L21/00;H01L21/683;H01L21/687;H02N13/00;H05B3/14 主分类号 H01L21/00
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