CARBON NANO TUBE ELECTRODE MANUFACTURING METHOD

摘要

PURPOSE: A method for manufacturing a carbon nano tube electrode is provided to form a cathode comprised of a carbon nano tube thin film by spraying and depositing aerosol carbon nano tube on a substrate through acceleration with a vacuum expansion principle. CONSTITUTION: Carbon nano tube materials(2) becomes aerosol. External transfer gas is supplied to an aerosol chamber(1) storing carbon nano tube materials and a carbon nano tube becomes aerosol. The aerosol carbon nano tube is sprayed and deposited on the substrate by the acceleration with a vacuum expansion principle. The aerosol carbon nano tube is sprayed on a deposition chamber(12) which has a substrate and is connected to the aerosol chamber. An electrode is made of a carbon nano tube thin film.